1904
Comparison of SiC Epitaxial Growth from Dichlorosilane and Tetrafluorosilane Precursors

Monday, October 28, 2013: 14:20
Continental 9, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Haizheng Song , University of South Carolina
Tawhid Rana , University of South Carolina
M.V.S. Chandrashekhar , University of South Carolina
Sabih U. Omar , University of South Carolina
Tangali S. Sudarshan , 301 Main Street, University of South Carolina, Columbia, SC

Abstract:

See more of: SiC Epitaxy
See more of: E3: GaN and SiC Power Technologies 3
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
<< Previous Abstract | Next Abstract >>