Wednesday, October 30, 2013: 14:10-15:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Chairs:
F. Roozeboom
and
A. Londergan
14:20
ALD Growth of PbTe and PbSe Superlattices for Thermoelectric Applications
Kai Zhang, Old Dominion University;
Arun Deepak Ramalingom Pillai, Old Dominion University;
David Nminibapiel, Old Dominion University;
Madhavi Tangirala, Old Dominion University;
Venkata S Chakravadhanula, Karlsruhe Nano Micro Facility;
Christian Kübel, Karlsruhe Institute of Technology;
Helmut Baumgart, Old Dominion University;
Vladimir Kochergin, MicroXact Inc.
14:40
(Invited) Synthesis, Characterization, and Application of Tunable Resistance Coatings Prepared by Atomic Layer Deposition
Jeffrey W. Elam, Argonne National Laboratory;
Anil U Mane, Argonne National Laboratory;
Joseph A. Libera, Argonne National Laboratory;
John N. Hryn, Argonne National Laboratory;
Oswald HW Siegmund, Space Sciences Laboratory;
Jason McPhate, Space Sciences Laboratory;
Matthew J Wetstein, Enrico Fermi Institute, University of Chicago;
Andrey Elagin, Enrico Fermi Institute, University of Chicago;
Michael J Minot, Incom, Inc.;
Aileen O'Mahony, Incom, Inc.;
Robert G Wagner, Argonne National Laboratory;
William M Tong, KLA-Tencor;
Alan D. Brodie, KLA-Tencor;
Mark A. McCord, KLA-Tencor;
Christopher F. Bevis, KLA-Tencor
