1858
(Invited) Synthesis, Characterization, and Application of Tunable Resistance Coatings Prepared by Atomic Layer Deposition

Wednesday, October 30, 2013: 14:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Jeffrey W. Elam , Argonne National Laboratory, Argonne, IL
Anil U Mane , Argonne National Laboratory
Joseph A. Libera , Argonne National Laboratory
John N. Hryn , Argonne National Laboratory
Oswald HW Siegmund , Space Sciences Laboratory
Jason McPhate , Space Sciences Laboratory
Matthew J Wetstein , Enrico Fermi Institute, University of Chicago
Andrey Elagin , Enrico Fermi Institute, University of Chicago
Michael J Minot , Incom, Inc.
Aileen O'Mahony , Incom, Inc.
Robert G Wagner , Argonne National Laboratory
William M Tong , KLA-Tencor
Alan D. Brodie , KLA-Tencor
Mark A. McCord , KLA-Tencor
Christopher F. Bevis , KLA-Tencor

Abstract:

See more of: General Session
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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