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(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable
(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable
Wednesday, May 14, 2014: 09:40
Union, Ground Level (Hilton Orlando Bonnet Creek)
The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.