(Invited) Reference Materials 8096 and 8097 - The Microelectromechanical Systems 5-in-1 Reference Materials: Homogeneous and Stable

The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods.  A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method.  This paper presents the data that are used to characterize the RMs as homogeneous and stable.