Drain Bias Effect on the Instability of Amorphous InGaZnO Thin-Film Transistors under Negative Gate Bias and Illumination Stress
The fabrication process of the bottom-gate IGZO TFT was reported in detail elsewhere (1). NBIS was applied with a gate voltage (VGS) of −40 V under blue light (460 nm) at an intensity of 0.2 mW/cm2. The NBIS was temporarily interrupted when the transfer characteristics were measured by a double-sweeping VGS mode in darkness at VDS of 0.1 V, and then NBIS was reapplied up to an accumulated stress time of 104 s. For the double-sweeping VGS mode, transfer characteristics were measured with VGSfrom −10 to 20 V (denoted hereafter as forward measurement), and then scanned instantly back to −10 V (denoted hereafter as reverse measurement).
Figure 1 shows the variation in the transfer characteristics under NBIS with grounded VDS for the forward and reverse measurements, respectively. In the initial stage of NBIS (< 1000 s), the transfer curves shifted in the negative VGS direction without SS degradation; on-current degradation was then observed in the subsequent stage (> 1000 s) in the forward measurement. In contrast, for the reverse measurements, the transfer curves hardly shifted within the initial NBIS duration of 1000 s, and then these exhibited a parallel shift in the positive VGS direction without SS degradation with increasing NBIS duration. We considered that the generated donor-like defects, originated from the ionized oxygen vacancies (VO+ and/or VO2+) and contributing to on-current degradation, were stabilized by capturing electrons during the forward measurement, and the trapped holes at the front-channel interface were detrapped by the positive VGSduring the forward measurement (2); therefore, electron trapping at the back-channel interface was an origin of the positive shift of the transfer curve without SS degradation in the subsequent reverse measurement.
To investigate the effect of the VDS bias on the NBIS degradation, VDS biases of 40 and −60 V were applied with VGS of −40 V. Figure 2 shows the transfer characteristics in the forward and reverse measurements before and after NBIS duration of 104 s with different VDS biases. NBIS with an additional positive VDS bias of 40 V accelerated the donor-like state creation near the source side because of the positively charged VO+ and/or VO2+ drifting from the drain to the source side under the influence of the lateral electric field, which contributed to more severe on-current degradation. The NBIS degradation was significantly suppressed by applying a large negative VDS bias of −60 V, because the positive charges of VO+ and/or VO2+ were easily neutralized by electrons under the accumulation condition in the drain region. The detailed degradation mechanisms of a-IGZO TFTs under NBIS with various VDSbiases will be presented at the conference.
1. D. Wang, M. P. Hung, J. Jiang, T. Toda, C. Li, and M. Furuta, Jpn. J. Appl. Phys., 53, 03CC01 (2014).