MEMS NEMS Fabrication

Tuesday, 7 October 2014: 08:00-11:50
Sunrise, 2nd Floor, Galactic Ballroom 8 (Moon Palace Resort)
Chairs:
Eric M Vogel and Nick Wu
08:00
681
(Invited) A Printed Carbon Nanotube Sensor on a Flexible Substrate
R. P. Tortorich, T. H. da Costa, E. Song, and J. W. Choi (Louisiana State University)
08:30
682
Graphene Synthesis on Electrodeposited Substrates and Its Integration in MEMS for Sensor Applications
M. Tocchio, S. Ieffa, R. Bernasconi, L. Magagnin, L. Nobili (Politecnico di Milano), C. Carraro, and R. Maboudian (University of California at Berkeley)
08:50
683
The Effects of Morphology on the Dielectric and Mechanical Properties of Parylene-C Microfibrous Thin Films
I. H. Khawaji, C. Chindam (The Pennsylvania State University), W. Orfali (Taibah University, Kingdom of Saudi Arabia), A. Lakhtakia, and O. O. Awadelkarim (The Pennsylvania State University)
09:10
684
Novel Non-Polarizable Dry Screenprinatable Polymeric Nanocomposite Micro-Sensors for Wearable Devices
A. Khosla (BI-Nanotechnology Inc.)
09:30
Break
09:50
685
Integration of PVDF (Polyvinylidene Fluoride) in MEMS Production
S. Holz, S. Kiricenko, and L. Rissing (Leibniz Universität Hannover)
10:10
686
Porous Silicon MEMS Infrared Filters for Micromechanical Photothermal Spectroscopy
D. A. Kozak (Post-doctoral Fellow, National Research Council), T. H. Stievater, M. W. Pruessner (Naval Research Laboratory), K. Nierenberg (University of Tulsa), and W. S. Rabinovich (Naval Research Laboratory)
10:30
687
Shape Anisotropy in Magneto-Impedance NiFe-Based Microsensors
M. Cortés, T. Peng, M. Woytasik, and J. Moulin (Université Paris Sud)
10:50
688
Unique Applications of Megasonic Energy to MEMS Single Substrate Wet Processes
D. Dussault (Product Systems, Inc.) and V. Dragoi (EV Group)
11:10
689
Wafer Bonding for MEMS Vacuum Packaging
V. Dragoi (EV Group) and E. Pabo (EV Group Inc.)
11:30
690
MEMS Based Eit Technology for Non-Invasive Breast Cancer Diagsnostics
A. Khosla (BI-Nanotechnology Inc.)
See more of: B2: Microfabricated and Nanofabricated Systems for MEMS/NEMS 11 (Chemical and Biological Sensors)
See more of: Chemical and Biological Sensors
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