MEMS NEMS Fabrication

Tuesday, 7 October 2014: 08:00-11:50
Sunrise, 2nd Floor, Galactic Ballroom 8 (Moon Palace Resort)
Chairs:
Eric M Vogel and Nick Wu
08:00
681
(Invited) A Printed Carbon Nanotube Sensor on a Flexible Substrate
R. P. Tortorich, T. H. da Costa, E. Song, and J. W. Choi (Louisiana State University)
08:30
682
Graphene Synthesis on Electrodeposited Substrates and Its Integration in MEMS for Sensor Applications
M. Tocchio, S. Ieffa, R. Bernasconi, L. Magagnin, L. Nobili (Politecnico di Milano), C. Carraro, and R. Maboudian (University of California at Berkeley)
08:50
683
The Effects of Morphology on the Dielectric and Mechanical Properties of Parylene-C Microfibrous Thin Films
I. H. Khawaji, C. Chindam (The Pennsylvania State University), W. Orfali (Taibah University, Kingdom of Saudi Arabia), A. Lakhtakia, and O. O. Awadelkarim (The Pennsylvania State University)
09:30
Break
09:50
685
Integration of PVDF (Polyvinylidene Fluoride) in MEMS Production
S. Holz, S. Kiricenko, and L. Rissing (Leibniz Universitńt Hannover)
10:10
686
Porous Silicon MEMS Infrared Filters for Micromechanical Photothermal Spectroscopy
D. A. Kozak (Post-doctoral Fellow, National Research Council), T. H. Stievater, M. W. Pruessner (Naval Research Laboratory), K. Nierenberg (University of Tulsa), and W. S. Rabinovich (Naval Research Laboratory)
10:30
687
Shape Anisotropy in Magneto-Impedance NiFe-Based Microsensors
M. CortÚs, T. Peng, M. Woytasik, and J. Moulin (UniversitÚ Paris Sud)
10:50
688
Unique Applications of Megasonic Energy to MEMS Single Substrate Wet Processes
D. Dussault (Product Systems, Inc.) and V. Dragoi (EV Group)
11:10
689
Wafer Bonding for MEMS Vacuum Packaging
V. Dragoi (EV Group) and E. Pabo (EV Group Inc.)