High Mobility Channel
High Mobility Channel
Monday, October 12, 2015: 09:00-12:30
105-B (Phoenix Convention Center)
Chairs:
Paul C. McIntyre
and
Shinichi Takagi
09:10
09:30
814
(Invited) Towards a Vertical and Damage Free Post-Etch InGaAs Fin Profile: Dry Etch Processing, Sidewall Damage Assessment and Mitigation Options (Cancelled)
11:00
See more of: D04: Semiconductors, Dielectrics, and Metals for Nanoelectronics 13
See more of: Dielectric Science and Materials
See more of: Dielectric Science and Materials