Recovery of Bias-Stress Ionized Igzo/SiO2 Interface States Via Cryogenic Relaxation

Monday, 29 May 2017: 11:50
Cambridge (Hilton New Orleans Riverside)


Indium gallium zinc oxide (IGZO) has been considered a potential replacement for hydrogenated amorphous silicon in TFT applications due to process compatibility and an order of magnitude improvement in electron channel mobility. However the mechanisms responsible for instability under bias-stress remain an active research topic. Silicon dioxide serving as the gate dielectric and back-channel passivation layer in bottom-gate IGZO TFTs results in high quality interfaces. Applied bias-stress conditions demonstrate a voltage shift that can be attributed to ionization and/or alteration of oxygen-related defects at these IGZO/SiO2interfaces.

Bottom-gate IGZO TFTs with SiO2 gate dielectric and passivation layers were fabricated and tested under rigorous positive bias-stress (PBS) and negative bias-stress (NBS) conditions. The devices demonstrate good stability under PBS (t > 104 s), with minor distortion in the subthreshold region and a slight characteristic left-shift from an initial pre-stress state. This PBS-shift is attributed to a change in the energy distribution of defect states at the front-channel interface. During NBS the devices exhibited a significant left-shift (ΔV ~ 1-2 V), which is attributed to the transformation of neutral oxygen vacancies to ionized donor states at the back-channel interface. This transformation appears to improve the electrical homogeneity of the back-channel interface, inferred by a suppression of DIBL-like behavior. The NBS-shift was found to be reversible over long recovery times at room temperature. The recovery time was dramatically reduced when samples were subjected to cryogenic temperature (77 K), which represents an accelerated return to the pre-stress condition. TCAD simulation provides additional support to the interpretation of bias-induced stress on IGZO TFTs.