Biological systems are organized hierarchically, with unique characteristics and functionalities spanning multiple length scales; some examples include collagen fibers, metabolic networks, and chromosome organization. It is important to select the right organizational length scale for device and biointerface design. In the case of sub-cellular organization, this length scale is on the order of tens to hundreds of nanometers. In this talk, I will present several chemical strategies for nanostructured silicon-based materials. These materials are deformable and have been tested with extra- and intracellular components (i.e., cytoskeleton and phospholipid bilayer) with an initial emphasis on optical control. These studies will deepen our understanding of the fundamental limits of physical and biological signal transduction between subcellular components and synthetic systems. At the end of my talk, I will discuss future opportunities in materials science toward seamless biointegration.