Recent advances in microelectromechanical systems technology have led to development of diverse small-scale devices that include microsensors, micromachines and devices for medical application. For these devices, there is an urgent need of new micro lithium-ion batteries (MLIBs) with high energy density and low cost. To avoid the leakage problems which could worsen both the operation and safety of microdevices powered powered by MLIB the use of solid electrolyte is highly desirable.

In this work, ceramic solid state and polymer solid electrolytes were prepared and deposited on the surface of SiC thin film anode by various techniques: in situ polymerization, drop coating technique, electropolymerization, magnetron spattering etc.

Despite the advantages of high capacity and low voltage of Si anode, its practical application restricted by severe volume expansion and mechanical degradation upon lithium alloying and de-alloying processes. In this term flexible thin polymer electrolyte could be a promising solution. A combination of nanoparticulate and thin film structure can provide significant mechanical stability to Si and mitigate its limitations.

Physical properties of the obtained samples were characterized by Raman spectroscopy, X-ray diffraction, atomic force microscopy and scanning/transmission electron microscopy techniques. Further, assembling CR2032 coin type cell, the electrochemical properties of the cell with obtained samples were evaluated as a part of all solid-state thin film battery.

Acknowledgements

This research was funded by the target program №0115РК03029 "NU­ Berkeley strategic initiative in warm ­dense matter, advanced materials and energy sources for 2014­-2018" from the Ministry of Education and Science of the Republic of Kazakhstan.