D02 Poster Session

Tuesday, 30 May 2017: 18:00-20:00
Grand Ballroom (Hilton New Orleans Riverside)
Mahendra Kumar Sunkara and Peter Mascher
Poly-Si Planarization by ICP Plasma Etch at FinFET Technology
Y. Wang (Semiconductor Manufacturing International Corporation), Q. Han (Semiconductor Manufacturing International Corp.), and H. Zhang (Semiconductor Manufacturing International Corporation)
Novel Biomedical Electrosurgical Device Containing Nanostructured Surface Functionalization for Minimally Invasive Surgery: Characterization and Histological Evaluation in Rat
H. Y. Cheng (Biomedical Materials and Tissue Engineering), K. L. Ou (Taipei Medical University), and S. Y. Chen (Cathay General Hospital, Sijhih, Taipei 221, Taiwan)
Copper Oxide Nanowire Plasma-Assisted Growth Dynamics and Role of Underlying Oxide Layers
U. Cvelbar (Jozef Stefan Institute), O. Baranov (National Aerospace University “KhAI”, Kharkov), and G. Filipič (Jozef Stefan Institute)
Facile Synthesis of Graphene Quantum Dots By Microplasma-Assisted Electrochemistry
J. S. Yang and W. H. Chiang (National Taiwan University of Science and Technology)