Plasma Nano Science and Technology 2

Monday, 29 May 2017: 14:00-15:40

Trafalgar (Hilton New Orleans Riverside)

Chairs:

Mahendra Kumar Sunkara , Uros Cvelbar and Peter Mascher

14:00

1016

T. Tsutsumi (Nagoya University), M. Zaitsu, A. Kobayashi, N. Kobayashi (ASM Japan K. K.), and M. Hori (Nagoya University)

14:40

1017

H. Ohmi, H. Kakiuchi, K. Yasutake (Dept. of Precision Science & Technology, Osaka University), and Y. Kubota (Tokyo Electron Limited)

15:00

1018

K. C. Yang (SungKyunKwan University), S. W. Park (Samsung Electronics), H. S. Lee, and G. Y. Yeom (SungKyunKwan University)

15:20

1019

T. Hieda, H. Hanafusa, and S. Higashi (Hiroshima University)