Contact and MOL Technology

Monday, 29 May 2017: 14:00-15:40
Churchill B2 (Hilton New Orleans Riverside)
Hemanth Jagannathan and Stefan De Gendt
(Invited) Contacts in Advanced CMOS: History and Emerging Challenges
C. Lavoie (IBM Research), P. Adusumilli (IBM Semiconductor Research and Development Center), A. V. Carr (IBM Research), J. S. Jordan Sweet (IBM T. J. Watson Research Center), A. S. Ozcan (IBM Research), E. Levrau (IBM T. J. Watson Research Center), N. Breil, and E. Alptekin (IBM Semiconductor Research and Development Center)
Cobalt CMP Development for 7nm Logic Device
C. Wu (GLOBALFOUNDRIES Inc), J. H. Han (GLOBALFOUNDRIES Inc.), X. Shi, D. R. Koli, and D. Penigalapati (GLOBALFOUNDRIES Inc)