Contact and MOL Technology

Monday, 29 May 2017: 14:00-15:40
Churchill B2 (Hilton New Orleans Riverside)
Chairs:
Hemanth Jagannathan and Stefan De Gendt
14:00
1256
(Invited) Contacts in Advanced CMOS: History and Emerging Challenges
C. Lavoie (IBM Research), P. Adusumilli (IBM Semiconductor Research and Development Center), A. V. Carr (IBM Research), J. S. Jordan Sweet (IBM T. J. Watson Research Center), A. S. Ozcan (IBM Research), E. Levrau (IBM T. J. Watson Research Center), N. Breil, and E. Alptekin (IBM Semiconductor Research and Development Center)
14:40
1257
MIS(p) Saturation Tunneling Current Controlled by Neighboring MIS Inversion Level Via Coupling Effect
M. H. Yang and J. G. Hwu (National Taiwan University)
15:00
1258
Cobalt CMP Development for 7nm Logic Device
C. Wu (GLOBALFOUNDRIES Inc), J. H. Han (GLOBALFOUNDRIES Inc.), X. Shi, D. R. Koli, and D. Penigalapati (GLOBALFOUNDRIES Inc)
15:20
1259
Rearrangement of Fringing Field by Sidewall Passivated Metal Gate in MIS Tunnel Diode
C. J. Chou and J. G. Hwu (National Taiwan University)
See more of: G02: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 7
See more of: Electronic Materials and Processing
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