(Invited) Scalable Growth of Two-Dimensional Materials – a Prerequisite for Process Integration

Wednesday, 4 October 2017: 16:10
Chesapeake C (Gaylord National Resort and Convention Center)
S. Kataria, S. Wagner, and M. C. Lemme (RWTH Aachen University)
Materials have always been at the heart of new inventions and, semiconductor industry is not an exception in this case. Two-dimensional (2D) materials are further enriching the available atlas of such novel materials. After the discovery of graphene in 2004, hundreds of other 2D materials are being explored owing to their distinct structures which lead to exciting properties and applications, unseen in other dimensions. Graphene and transition metal dichalcogenides (TMDs) based on molybdenum and tungsten have shown great promises for future technological applications including Internet of Things. Moreover, intriguing desired properties can be obtained by making hybrids and heterostructures of suitable 2D materials. Chemical vapor deposition (CVD) is the technique with a potential for scaling up the production of good quality 2D materials.

In this talk, I will give a brief introduction to 2D materials like graphene and molybdenum disulphide (MoS2) with emphasis on their large-scale production using CVD method. The open challenges for integrating these materials, especially graphene, into process technology will be discussed.


1. Butler SZ, Hollen SM, Cao L, Gupta JA, Gutierrez HR, Heinz TF et al. Progress, Challenges and Opportunities in Two-Dimensional Materials Beyond Graphene. ACS Nano 7 (2013) 2898.

2. Kataria S, Patsha A, Dhara S, Tyagi AK, Barshilia HC. Raman Imaging on High-Quality Graphene Grown by Hot-Filament Chemical Vapor Deposition. J Raman Spectrosc. 43 (2012) 1864.

3. Chang C-K, Kataria S, Kuo C-C, Ganguly A, Wang B-Y, Hwang J-Y, et al. Band Gap Engineering of Chemical Vapor Deposited Graphene by in Situ BN Doping. ACS Nano 7 (2013) 1333.

4. Kataria S, Wagner S, Ruhkopf J, Gahoi A, Pandey H, Bornemann R, et al. Chemical Vapor Deposited Graphene: From Synthesis to Applications. Phys Status Solidi A 211 (2014) 2439.

5. Lupina G, Kitzmann J, Costina I, Lukosius M, Wenger C, Wolff A, Kataria S et al. Residual Metallic Contamination of Transferred Chemical Vapor Deposited Graphene. ACS Nano 9 (2015) 4776.

6. Bablich A, Kataria S, Lemme MC. Graphene and Two-Dimensional Materials for Optoelectronic Applications. Electronics. 5 (2016) 13.

7. Riazimehr S, Bablich A, Schneider D, Kataria S, Passi V, Yim C et al. Spectral Sensitivity of Graphene/Silicon Heterojunction Photodetectors. Solid-State Electron 115 (2016) 207.

8. Kataria S, Wagner S, Cusati T, Fortunelli A, Iannaccone G, Pandey H, Fiori G, Lemme MC. Growth-Induced Strain in Chemical Vapor Deposited Monolayer MoS2: Experimental and Theoretical Investigation. Adv Mat Inter (2017) DOI: 10.1002/admi.201700031.