G03 Semiconductor Process Integration 10

Lead Organizer: Junichi Murota (Tohoku University, Japan)

Co-organizers: Cor Claeys (imec) , Hiroshi Iwai (National Chiao Tung University) , Meng Tao (Arizona State University) , Simon Deleonibus (CEA-LETI) , Andreas Mai (IHP) , Kenji Shiojima (University of Fukui) and Patrick Chin (IQE plc)

Monday, 2 October 2017

08:00-10:20


Plenary Session
Chesapeake C
Chair(s): Junichi Murota and Cor Claeys

10:20-12:20


Technology Trends
Chesapeake C
Chair(s): Simon Deleonibus and Kenji Shiojima

14:00-16:00


Interconnection
Chesapeake C
Chair(s): Christophe Detavernier and Hiroshi Nakashima

Tuesday, 3 October 2017

08:00-10:00


Electronic and Photonic Materials and Characterization 1
Chesapeake C
Chair(s): Chee-Wee Liu and Eddy Simoen

10:00-12:00


Electronic and Photonic Materials and Characterization 2
Chesapeake C
Chair(s): Hiroshi Iwai and Yasuo Takahashi

14:00-15:50


3D Integration
Chesapeake C
Chair(s): S├ębastien Kerdil├Ęs and Jin Kawakita

15:50-17:20


Novel Process-Patterning
Chesapeake C
Chair(s): Seiichi Miyazaki and Vincent Bouchiat

Wednesday, 4 October 2017

08:00-10:30


High Performance Device and Heterogeneous Integration 1
Chesapeake C
Chair(s): Kangguo Cheng and Patrick Chin

10:30-12:30


High Performance Device and Heterogeneous Integration 2
Chesapeake C
Chair(s): Gamal Refai-Ahmed and Matthias Wietsruck

14:00-15:40


Novel Process-Growth 1
Chesapeake C
Chair(s): Roger Loo and Andreas Mai

15:40-17:40


Novel Process-Growth 2
Chesapeake C
Chair(s): Kenji Shiojima and Junichi Murota