High Performance Device and Heterogeneous Integration 2

Wednesday, 4 October 2017: 10:30-12:30
Chesapeake C (Gaylord National Resort and Convention Center)
Gamal Refai-Ahmed and Matthias Wietsruck
(Invited) How to Integrate MEMS on Foundry-Fabricated CMOS Backplanes
M. Schulze, C. Hohle, and M. Friedrichs (Fraunhofer IPMS)
(Invited) Detection of Bacterial Fluorescence by the Combination of MEMS Microfluidic Chip and Si Photodetector toward On-Chip Biological Sensing
S. Onishi, C. Y. Joon, M. Ishida, K. Sawada, H. Ishii (Toyohashi University of Technology), K. Machida, K. Masu (Tokyo Institute of Technology), Y. Nikaido, M. Saito (University of Occupational and Environmental Health), and S. Yoshida (Fukuoka Megumi Hospital)