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Electronic Materials and Processing
Monday, 2 October 2017
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08:00-10:00
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices I
Chesapeake F
Chair(s):
Colm O'Dwyer and Jaeho Lee
08:00-10:20
G03: Semiconductor Process Integration 10
Plenary Session
Chesapeake C
Chair(s):
Junichi Murota and Cor Claeys
08:30-11:20
G02: Atomic Layer Deposition Applications 13
Atomic Layer Etching
Chesapeake L
Chair(s):
Fred Roozeboom
08:50-09:00
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Welcoming Remarks
Chesapeake I
Chair(s):
Jerzy Ruzyllo and Takeshi Hattori
09:00-10:00
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Keynote
Chesapeake I
Chair(s):
Jerzy Ruzyllo and Takeshi Hattori
10:00-12:20
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Pattern Collapse-related Issues and Their Solutions
Chesapeake I
Chair(s):
Paul W. Mertens and Stijn F. L. Mertens
10:00-12:40
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices II
Chesapeake F
Chair(s):
Jaeho Lee and Colm O'Dwyer
10:20-12:20
G03: Semiconductor Process Integration 10
Technology Trends
Chesapeake C
Chair(s):
Simon Deleonibus and Kenji Shiojima
11:20-13:00
G02: Atomic Layer Deposition Applications 13
ALD for Microelectronics
Chesapeake L
Chair(s):
O. van der Straten and Stefan De Gendt
14:00-16:00
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Wet Cleaning and Contamination Control
Chesapeake I
Chair(s):
Richard E Novak and Koichiro Saga
G02: Atomic Layer Deposition Applications 13
Area Selective ALD
Chesapeake L
Chair(s):
Stefan De Gendt
G03: Semiconductor Process Integration 10
Interconnection
Chesapeake C
Chair(s):
Christophe Detavernier and Hiroshi Nakashima
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices III
Chesapeake F
Chair(s):
Colm O'Dwyer and Jaeho Lee
Tuesday, 3 October 2017
Monday
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Tuesday
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Wednesday
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08:00-10:00
G03: Semiconductor Process Integration 10
Electronic and Photonic Materials and Characterization 1
Chesapeake C
Chair(s):
Chee-Wee Liu and Eddy Simoen
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices IV
Chesapeake F
Chair(s):
Renkun Chen and Kafil M. Razeeb
08:00-10:40
G02: Atomic Layer Deposition Applications 13
ALD for Energy Storage / Batteries
Chesapeake L
Chair(s):
Christophe Detavernier
08:30-08:40
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Introductory Remarks
Chesapeake I
Chair(s):
Takeshi Hattori and Jerzy Ruzyllo
08:40-11:50
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Ge, SiGe, and III-V Surface Conditioning and Etching
Chesapeake I
Chair(s):
Anthony J. Muscat and Kenta Arima
09:00-12:10
G05: Oxide Memristors
Resistive Switching in Perovskites
Camellia 4
Chair(s):
Bilge Yildiz and Jennifer L.M. Rupp
10:00-12:00
G03: Semiconductor Process Integration 10
Electronic and Photonic Materials and Characterization 2
Chesapeake C
Chair(s):
Hiroshi Iwai and Yasuo Takahashi
10:00-12:40
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices V
Chesapeake F
Chair(s):
Kafil M. Razeeb and Renkun Chen
10:40-12:20
G02: Atomic Layer Deposition Applications 13
Alternative ALD and Diagnostics
Chesapeake L
Chair(s):
Chanyuan Liu and J. W. Elam
14:00-15:00
G02: Atomic Layer Deposition Applications 13
ALD for Solar Power
Chesapeake L
Chair(s):
Chanyuan Liu
14:00-15:40
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Photoresist and Dry Etch Residue Removal
Chesapeake I
Chair(s):
Koichiro Saga and Richard E Novak
14:00-15:50
G03: Semiconductor Process Integration 10
3D Integration
Chesapeake C
Chair(s):
Sébastien Kerdilès and Jin Kawakita
14:00-17:40
G05: Oxide Memristors
Resistive Switching Dynamics
Camellia 4
Chair(s):
Mónica Burriel and Teresa Puig
14:00-17:50
G04: Thermoelectric and Thermal Interface Materials 3
Thermoelectric and Thermal Interface Materials and Devices VI
Chesapeake F
Chair(s):
Colm O'Dwyer and Kafil M. Razeeb
15:00-17:25
G02: Atomic Layer Deposition Applications 13
ALD Metal and Metalfluorides
Chesapeake L
Chair(s):
J. W. Elam and Fred Roozeboom
15:40-17:20
G01: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
Wet Etching and Contamination Removal
Chesapeake I
Chair(s):
Paul W. Mertens and Anthony J. Muscat
15:50-17:20
G03: Semiconductor Process Integration 10
Novel Process-Patterning
Chesapeake C
Chair(s):
Seiichi Miyazaki and Vincent Bouchiat
18:00-20:00
G02: Atomic Layer Deposition Applications 13
G02 Poster Session
Prince George's Exhibit Hall D/E
Wednesday, 4 October 2017
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Tuesday
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Wednesday
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08:00-10:30
G03: Semiconductor Process Integration 10
High Performance Device and Heterogeneous Integration 1
Chesapeake C
Chair(s):
Kangguo Cheng and Patrick Chin
09:00-12:10
G05: Oxide Memristors
Resistive Switching in Binary Oxides
Camellia 4
Chair(s):
Anthony Joseph Kenyon and Jeehwan Kim
10:30-12:30
G03: Semiconductor Process Integration 10
High Performance Device and Heterogeneous Integration 2
Chesapeake C
Chair(s):
Gamal Refai-Ahmed and Matthias Wietsruck
14:00-15:40
G03: Semiconductor Process Integration 10
Novel Process-Growth 1
Chesapeake C
Chair(s):
Roger Loo and Andreas Mai
14:00-17:20
G05: Oxide Memristors
New Concepts for Oxide Memristors
Camellia 4
Chair(s):
Xin Guo
15:40-17:40
G03: Semiconductor Process Integration 10
Novel Process-Growth 2
Chesapeake C
Chair(s):
Kenji Shiojima and Junichi Murota
18:00-20:00
G04: Thermoelectric and Thermal Interface Materials 3
G04 Poster Session
Prince George's Exhibit Hall D/E
G05: Oxide Memristors
G05 Poster Sesssion
Prince George's Exhibit Hall D/E
