Alternative ALD and Diagnostics

Tuesday, 3 October 2017: 10:40-12:20
Chesapeake L (Gaylord National Resort and Convention Center)
Chanyuan Liu and J. W. Elam
Digital Doping of ALD VO2 for Thermochromic Applications
A. C. Kozen, M. Currie (U.S. Naval Research Laboratory), K. L. Jungjohann (Sandia National Laboratories), B. P. Downey, C. R. Eddy Jr., and V. D. Wheeler (U.S. Naval Research Laboratory)
Optimizing Process Parameters for Plasma Assisted Atomic Layer Deposition
D. R. Boris (U. S. Naval Research Laboratory), V. D. Wheeler (U.S. Naval Research Laboratory), V. R. Anderson (ASEE Postdoctoral Fellow - residing at NRL), N. Nepal (U.S. Naval Research Laboratory), S. G. Rosenberg, A. C. Kozen (ASEE Postdoctoral Fellow - residing at NRL), J. K. Hite, S. G. Walton, and C. R. Eddy Jr. (U.S. Naval Research Laboratory)
(Invited) Molecular Layer Deposition from Dissolved Precursors
J. Fichtner (Friedrich-Alexander University of Erlangen-Nürnberg), Y. Wu (Friedrich-Alexander Universität Erlangen-Nurnberg), J. Hitzenberger, T. Drewello (Friedrich-Alexander University of Erlangen-Nürnberg), and J. Bachmann (Friedrich-Alexander Universität Erlangen-Nürnberg)
Reusable Sorbent for Oil Spill Cleanup Fabricated Using Sequential Infiltration Synthesis
J. W. Elam, J. R. Avila, E. F. Barry, S. B. Darling, J. A. Libera, and A. U. Mane (Argonne National Laboratory)