G02 Atomic Layer Deposition Applications 13

Lead Organizer: Fred Roozeboom (Eindhoven University of Technology)

Co-organizers: Stefan De Gendt (Imec vzw) , Jolien Dendooven (Ghent University) , Jeffrey W Elam (Joint Center for Energy Storage Research) , O. van der Straten (IBM Research) and Chanyuan Liu (Lam Research)

Monday, 2 October 2017

08:30-11:20


Atomic Layer Etching
Chesapeake L
Chair(s): Fred Roozeboom

11:20-13:00


ALD for Microelectronics
Chesapeake L
Chair(s): O. van der Straten and Stefan De Gendt

14:00-16:00


Area Selective ALD
Chesapeake L
Chair(s): Stefan De Gendt

Tuesday, 3 October 2017

08:00-10:40


ALD for Energy Storage / Batteries
Chesapeake L
Chair(s): Christophe Detavernier

10:40-12:20


Alternative ALD and Diagnostics
Chesapeake L
Chair(s): Chanyuan Liu and J. W. Elam

14:00-15:00


ALD for Solar Power
Chesapeake L
Chair(s): Chanyuan Liu

15:00-17:25


ALD Metal and Metalfluorides
Chesapeake L
Chair(s): J. W. Elam and Fred Roozeboom

18:00-20:00


G02 Poster Session
Prince George's Exhibit Hall D/E