ALD Metal and Metalfluorides

Tuesday, 3 October 2017: 15:00-17:25
Chesapeake L (Gaylord National Resort and Convention Center)
J. W. Elam and Fred Roozeboom
(Invited) Atomic Layer Deposition of Cobalt, Nickel, and Iron Sulfides: Synthesis and Applications
X. Wang (School of Adv Mater, Shenzhen Grad School, Peking Univ)
Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
S. Aussen, A. Hardtdegen, K. Skaja, and S. Hoffmann-Eifert (PGI and JARA-Fit, Forschungszentrum J├╝lich GmbH, Germany)
(Invited) Atomic Layer Deposition of Nanoalloys of Noble and Non-Noble Metals
R. K. Ramachandran, J. Dendooven (Ghent University), M. Filez (Utrecht University), V. V. Galvita, H. Poelman, E. Solano, M. M. Minjauw, G. B. Marin (Ghent University), and C. Detavernier (Department of Solid State Sciences, Ghent University)
(Invited) ALD Metal Fluorides for Ultraviolet Filter and Reflective Coating Applications
J. Hennessy, A. Jewell, and S. Nikzad (Jet Propulsion Laboratory)
Concluding Remarks