Electronic and Photonic Materials and Characterization 1

Tuesday, 3 October 2017: 08:00-10:00
Chesapeake C (Gaylord National Resort and Convention Center)
Chairs:
Chee-Wee Liu and Eddy Simoen
08:00
1124
(Invited) Impact of the Metal Gate on the Oxide Stack Quality Assessed by Low-Frequency Noise
E. Simoen (imec), L. He (Xidian University), B. O'Sullivan (imec), A. Veloso (Imec), N. Horiguchi (imec, Belgium), N. Collaert, and C. Claeys (Imec)
 
1125
(Invited) High-K Evolution: Subnanometer EOT Challenges and Future Perspectives for Scaling (Cancelled)
09:00
1126
(Invited) Epitaxial Ge/GeSn High Mobility Channel Transistors
C. W. Liu (National Taiwan University, National Nano Device Laboratories), I. H. Wong, F. L. Lu, and Y. S. Huang (National Taiwan University)
09:30
1127
The Effect of Low Temperature Annealing on the Deactivation and Defect Formation in Highly Doped Si:P Epitaxially Grown Films
Z. Weinrich, D. L. Brown, A. Atassi (University of Florida), X. Li (Applied Materials), S. Sharma (Applied Materials Inc.), H. Chung (Applied Materials), and K. S. Jones (University of Florida)
09:50
Break
See more of: G03: Semiconductor Process Integration 10
See more of: Electronic Materials and Processing
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