Electronic and Photonic Materials and Characterization 1

Tuesday, 3 October 2017: 08:00-10:00
Chesapeake C (Gaylord National Resort and Convention Center)
Chairs:
Chee-Wee Liu and Eddy Simoen
08:00
(Invited) Impact of the Metal Gate on the Oxide Stack Quality Assessed by Low-Frequency Noise
E. Simoen (imec), L. He (Xidian University), B. O'Sullivan (imec), A. Veloso (Imec), N. Horiguchi, N. Collaert (imec, Belgium), and C. Claeys (Imec)
 
1125
(Invited) High-K Evolution: Subnanometer EOT Challenges and Future Perspectives for Scaling (Cancelled)
09:00
(Invited) Epitaxial Ge/GeSn High Mobility Channel Transistors
C. W. Liu (National Taiwan University, National Nano Device Laboratories), I. H. Wong, F. L. Lu, and Y. S. Huang (National Taiwan University)
09:30
The Effect of Low Temperature Annealing on the Deactivation and Defect Formation in Highly Doped Si:P Epitaxially Grown Films
Z. Weinrich, D. L. Brown, A. Atassi (University of Florida), X. Li, S. Sharma, H. Chung (Applied Materials), and K. S. Jones (University of Florida)
09:50
Break