Monday, 2 October 2017: 09:00-10:00
Chesapeake I (Gaylord National Resort and Convention Center)
Jerzy Ruzyllo and Takeshi Hattori
(Invited) Challenges on Surface Conditioning in 3D Device Architectures: Triple-Gate FinFETs, Gate-All-Around Lateral and Vertical Nanowire FETs
A. Veloso, V. Paraschiv, E. Vecchio, K. Devriendt, W. Li, E. Simoen, B. T. Chan, Z. Tao, E. Rosseel, R. Loo, A. P. Milenin, B. Kunert, L. Teugels, F. Sebaai, C. Lorant, D. van Dorp, E. Altamirano-Sánchez, S. Brus, P. Marien, C. Fleischmann, D. Melkonyan, T. Huynh-Bao, G. Eneman, G. Hellings, A. Sibaja-Hernandez, P. Matagne, N. Waldron, D. Mocuta, and N. Collaert (Imec)
Coffee Break