Tuesday, 15 May 2018: 18:00-20:00
	Ballroom 6ABC (Washington State Convention Center)
	
	
		
	
	
	
		Chairs:
			
				
					
					
						Fred Roozeboom
					
				
					 and 
					
						Stefan De Gendt
					
				
			
 
		
		
			1390
		
	
	
		
			Investigating the Elimination of Oxygen Vacancy and Nitrogen Gap in Hafnium Oxide Films Induced By Different Nitridation Process (Cancelled)
		
	
		
			1391
		
	
	
		
			Enhanced Non-Linearity Factor in Ferroelectric Tunnel Junction Based on HfO2 Heterojunction (Cancelled)
		
	
		
			1393
		
	
	
		
			Improvement of Line Width Roughness and Line Edge Roughness for Ultrascaled Finfet Technologies (Cancelled)
		
	
		
			1395
		
	
	
		
			Reliability Characteristics of Low Dielectric Constant Materials Under Mechanical-Electrical Stress (Cancelled)
		
	
		
			1396
		
	
	
		
			Effect of Copper Diffusion in Low Dielectric Constant Dielectrics Under Thermal Stress on Electrical and Reliability Characteristics (Cancelled)
		
	
		
			1399
		
	
	
		
			Novel Method for Metal-Insulator-Metal (MIM) Plasma Etching Residue Removal (Cancelled)
		
	
