G03 - Metrology

Thursday, 13 October 2022: 08:30-10:10
Room 212 (The Hilton Atlanta)
Chairs:
Andreas Schulze and Andreas Mai
09:00
Study of Dopant Activation in Arsenic-Implanted Laser Annealed Si By Differential Hall Effect Metrology (DHEM)
A. Joshi (Active Layer Parametrics (ALP), Scotts Valley, California, USA), T. Tabata, F. Roze (Laser Systems & Solutions of Europe (LASSE)), and B. M. Basol (Active Layer Parametrics (ALP), Scotts Valley, California, USA)
09:20
Nanoscale Mapping of Strain Variations in Vicinity of Si/Sige Spin Qubit Devices By Scanning X-Ray Diffraction Microscopy
C. Richter (Leibniz-Institut für Kristallzüchtung), C. Corley-Wiciak (IHP - Leibniz-Institut für innovative Mikroelektronik), M. H. Zöllner (IHP-Leibniz-Institut für innovative Mikroelektronik), Y. Yamamoto (IHP), K. Anand (IHP - Leibniz-Institut für innovative Mikroelektronik), G. Capellini (IHP – Leibniz-Institut für innovative Mikroelektronik), L. Schreiber (JARA-FIT Institute for Quantum Information, FZJ GmbH, RWTH Aachen University), W. Langheinrich (Infineon Technologies Dresden GmbH&Co.KG), E. Zatterin (The European Synchrotron Radiation Facility (ESRF),), T. Schulli (European Synchrotron Radiation Facility), M. Virgilio (Università di Pisa, Italy), C. L. Manganelli, and F. Reichmann (IHP - Leibniz-Institut für innovative Mikroelektronik)
09:40
Imaging Atomic Structure, Strain, and Disorder By Atomic Electron Tomography
P. Ercius (Lawrence Berkeley National Laboratory), J. Zhou (Peking University), Y. Yang (KAIST), Y. Yang, D. Kim, Y. Yuan, X. Tian (University of California Los Angeles), C. Ophus (Lawrence Berkeley National Laboratory), F. Sun (University of Buffalo), A. Schmid (Lawrence Berkeley National Laboratory), and J. Miao (University of California Los Angeles)