1052
Trimethylgallium and Triethylgallium for Doping of Sige and Ge Epitaxial Layers

Tuesday, 2 October 2018: 14:50
Universal 13 (Expo Center)

ABSTRACT WITHDRAWN

See more of: Epitaxy 1
See more of: G03: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 8
See more of: Electronic Materials and Processing
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