Nano-Heteroepitaxy: An Investigation of SiGe Nano-Pillars Coalescence
M. Mastari (Univ. Grenoble Alpes, CEA, LETI, 38000 Grenoble, France), M. Charles (Univ. Grenoble Alpes, CEA, LETI), Y. Bogumilowicz, P. Pimenta-Barros, M. Argoud, R. Tiron, A. M. Papon, D. Muyard, N. Chevalier (Univ. Grenoble Alpes, CEA, LETI, 38000 Grenoble, France), D. Landru, Y. Kim (SOITEC, Parc Techno des Fontaines F-38190 Bernin, France), and J. M. Hartmann (Univ. Grenoble Alpes, CEA, LETI, 38000 Grenoble, France)