Tutorial on Atomic Layer Etching

Monday, 1 October 2018: 08:00-09:00
Universal 16 (Expo Center)
Chair:
Fred Roozeboom
08:00
981
(Invited) Etching of Advanced Semiconductor Devices
T. Lill (Lam Research)
See more of: G02: Atomic Layer Deposition Applications 14
See more of: Electronic Materials and Processing
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