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Si-Passivation of Epitaxial SiGe: Kinetics and Impact on Morphology

Monday, May 13, 2013: 11:00
Norfolk, Mezzanine Level (Sheraton)
Birgit Seiss , STMicroelectronics, Crolles, France
Didier Dutartre , STMicroelectronics

Abstract:

See more of: Planar Si &SiGe: Stressors/Gate Stack
See more of: E5: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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