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(Invited) III-V/High-k Defects: DIGS vs. Border Traps

Wednesday, May 15, 2013: 16:10
Provincial Ballroom North, Second Floor (Sheraton)
Christopher L. Hinkle , University of Texas at Dallas, Richardson, TX
Rohit V. Galatage , University of Texas at Dallas
Hong Dong , University of Texas at Dallas
Sarkar R. M. Anwar , University of Texas at Dallas
Barry Brennan , University of Texas at Dallas
Robert M. Wallace , University of Texas at Dallas
Eric M. Vogel , Georgia Institute of Technology

Abstract: