875
(Invited) Commercial CMOS-Integrated RF-MEMS

Tuesday, May 14, 2013: 17:20
Norfolk, Mezzanine Level (Sheraton)
Art Morris , WiSpry, Inc., Irvine, CA
Shawn Cunningham , WiSpry, Inc.

Abstract:

  • E5-0875 (186.5KB) - Abstract Text
See more of: 3D Integration/ReRAM/MEMS
See more of: E5: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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