874
InP-Si BiCMOS Heterointegration Using a Substrate Transfer Process

Tuesday, May 14, 2013: 17:00
Norfolk, Mezzanine Level (Sheraton)
Marco Lisker , IHP, Frankfurt (Oder), Germany
Andreas Trusch , IHP
Andreas Krüger , IHP
Mirko Fraschke , IHP
Philipp Kulse , IHP
Yevgen Borokhovych , IHP
Bernd Tillack, Dr. , IHP
Ina Ostermay , FBH
Tomas Krämer , FBH
Andreas Thies , FBH
Olaf Krüger , FBH
Franz-Josef Schmückle , FBH
Viktor Krozer , FBH
Wolfgang Heinrich , TU Berlin

Abstract:

See more of: 3D Integration/ReRAM/MEMS
See more of: E5: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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