1859
(Invited) Unit Steps of an ALD Half-Cycle

Wednesday, October 30, 2013: 15:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Tom Blomberg , ASM Microchemistry Ltd., Helsinki, Finland

Abstract:

See more of: Reaction Mechanisms & Characterization
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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