Development of an All-Wet-Etch Process Chemistry for the Patterning of Metal Conductors in Igzo Thin-Film-Transistors

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Development of an All-Wet-Etch Process Chemistry for the Patterning of Metal Conductors in Igzo Thin-Film-Transistors

Tuesday, October 29, 2013

Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)

Kurtis Leschkies, Ph.D. , Applied Materials, Inc., Santa Clara, CA

Steven Verhaverbeke , Applied Materials, Inc.

D. K. Yim , Applied Materials, Inc.

H. C. Hsu , Applied Materials, Inc.

H. Kim , Applied Materials, Inc.

R. Lim , Applied Materials, Inc.

J. M. White , Applied Materials, Inc.

Robert J. Visser , Applied Materials, Inc.

Abstract: