1879
(Invited) ALD and Pulsed-CVD of Ru, RuO2, and SrRuO3

Thursday, October 31, 2013: 15:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Jeong Hwan Han , Seoul National University, Seoul, South Korea
Cheol Seong Hwang , Seoul National University, Seoul, South Korea

Abstract:

  • E2-1879 (105.4KB) - Abstract Text
See more of: Oxides and Conductors for Advanced Devices
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