2120
Translation of Particles to Wafers during Spin Coating

Tuesday, October 29, 2013: 16:20
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
C. W. Extrand , Entegris, Chaska, MN
Sung In Moon , Entegris
Loxie Monson , Entegris

Abstract:

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