2103
Effect of Surface Wettability on Frictional Conditions of PVA Roll Brushes

Monday, October 28, 2013: 15:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Yoshitaka Hara , Shizuoka University
Toshiyuki Sanada , Shizuoka University, Hamamatsu, Japan
Akira Fukunaga , Ebara Corporation
Hirokuni Hiyama , Ebara Corporation

Abstract:

See more of: Wet Etching and Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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