1887
(Invited) Plasma-Enhanced Atomic Layer Deposition of III-Nitride Thin Films

Friday, November 1, 2013: 10:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Cagla Ozgit-Akgun , Bilkent University, Ankara, Turkey
Inci Donmez , Bilkent University
Necmi Biyikli, Ph.D. , Bilkent University

Abstract:

See more of: III-V and Silicon MOS
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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