2082
Positive Tone, Chemically Amplified, Cross-Linkable Dielectric

Tuesday, October 29, 2013: 17:00
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Brennen Mueller , Georgia Institute of Technology, Atlanta, GA
Paul A Kohl, Ph.D. , Georgia Institute of Technology, Atlanta, GA

Abstract:

See more of: Copper Damascene Interconnections
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See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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