2005
Impact of STI Gap-Fill Process Deposited by HDP-CVD in Flash Memory

Wednesday, October 30, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Hyoung-sun Park , Samsung Electronics Co., Ltd, Suwon, South Korea
Ki-yong Kim , Samsung Electronics Co., Ltd
Ok-cheon Hong , Samsung Electronics Co., Ltd
Hong-sig Kim , Samsung Electronics Co., Ltd
Haebum Lee, Ph.D. , Samsung Electronics Co., Ltd
Kyu-pil Lee, Ph.D. , Samsung Electronics Co., Ltd
In-soo Cho , Samsung Electronics Co., Ltd
Byoung-deog Choi, Ph.D. , Sungkyunkwan University, Suwon, South Korea

Abstract:

See more of: E5 Poster Session
See more of: E5: Nonvolatile Memories
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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