2109
Evaluation of TaN as the Wet Etch Stop Layer during the 22nm HKMG Gate Last CMOS Integrations
Evaluation of TaN as the Wet Etch Stop Layer during the 22nm HKMG Gate Last CMOS Integrations
Tuesday, October 29, 2013: 10:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Hushan Cui
,
Chinese Academy of Sciences, Beijing, China
Jing Xu
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
Jianfeng Gao
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Jinjuan Xiang
,
Chinese Academy of Sciences, Beijing, China
Yihong Lu
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Zhaoyun Tang
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Xiaobin He
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Tingting Li
,
Chinese Academy of Sciences
Jun Luo
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Xiaolei Wang
,
Chinese Academy of Sciences
Bo Tang
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Jiahan Yu
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Tao Yang
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Jiang Yan
,
Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences
Junfeng Li
,
Chinese Academy of Sciences
Chao Zhao
,
Chinese Academy of Sciences
Abstract:
- E8-2109 (165.1KB) - Abstract Text