2099
A Multi-Frequency Megasonic System for Nano-Particle Removal

Monday, October 28, 2013: 11:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Hyunse Kim, Ph. D. , Korea Institute of Machinery and Materials, Daejeon, South Korea
Yanglae Lee , Korea Institute of Machinery and Materials
Euisu Lim , Korea Institute of Machinery and Materials

Abstract:

  • E8-2099 (408.8KB) - Abstract Text
See more of: Particle Removal
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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