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Integration of Wet Cleaning in 45 Nm Pitch BEOL Processing

Tuesday, October 29, 2013: 10:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Els Kesters , imec, Heverlee, Belgium
Quoc Toan Le , imec
Frederic Lazzarino , imec
Stefan Decoster , imec
Chris Wilson , imec
Ihsan Simms , Tokyo Electron
Frank Holsteyns , imec
Stefan De Gendt , KU Leuven

Abstract:

See more of: FEOL & BEOL Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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