1864
VO2 Films Prepared by Atomic Layer Deposition and RF Magnetron Sputtering 

Wednesday, October 30, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Madhavi Tangirala , Newport News
Kai Zhang , Newport News, Newport News, VA
David Nminibapiel , Newport News
Venkateswara Pallem , Delaware Research & Technology Center
Christian Dussarrat , Delaware Research & Technology Center
Wei Cao , Newport News
Thomas N Adam, PhD , University at Albany
Corbet S Johnson, B.Sc. , University at Albany
Hani Elsayed-Ali , Newport News
Helmut Baumgart , Newport News, Newport News, VA

Abstract:

  • E2-1864 (798.1KB) - Abstract Text
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See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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