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Nanoscale Film Thickness Measurements By X-Ray Fluorescence Spectroscopy for ALD Grown Films

Wednesday, October 30, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Tarek M Abdel-Fattah , Christopher Newport University, Newport News, VA
Helmut Baumgart , Old Dominion University, Newport News, VA

Abstract:

See more of: Poster Session
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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