2108
Feol and Beol Cleaning Challenges for 2x and Sub-20nm Technology Nodes

Tuesday, October 29, 2013: 09:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Akshey Sehgal , GLOBALFOUNDRIES, Malta, NY

Abstract:

See more of: FEOL & BEOL Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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