2095
(Invited) Particle Cleaning Technologies to Meet Advanced Semiconductor Device Process Requirements
Monday, October 28, 2013: 10:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Harald F. Okorn-Schmidt
,
Lam Research AG, Villach, Austria
Frank Holsteyns
,
Lam Research AG
Alexander Lippert
,
Lam Research AG
David Mui
,
Lam Research
Mark Kawaguchi
,
Lam Research
Christiane Lechner
,
Institute of Fluid Mechanics and Heat Transfer, Vienna University of Technology, A-1040 Vienna, Austria
Philipp E. Frommhold
,
Christian-Doppler-Laboratory for Cavitation and Micro-Erosion, Drittes Physikalisches Institut Georg-August-Universität Göttingen, D-37077 Göttingen, Germany
Till Nowak
,
Christian-Doppler-Laboratory for Cavitation and Micro-Erosion, Drittes Physikalisches Institut Georg-August-Universität Göttingen, D-37077 Göttingen, Germany
Robert Mettin
,
Christian-Doppler-Laboratory for Cavitation and Micro-Erosion, Drittes Physikalisches Institut Georg-August-Universität Göttingen, D-37077 Göttingen, Germany
