2096
A Study of Nanoparticle Removal on Patterned Surfaces

Monday, October 28, 2013: 10:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Antoine Pacco , imec, Heverlee, Belgium
Frank Holsteyns , imec
Stefan De Gendt , IMEC

Abstract:

  • E8-2096 (592.7KB) - Abstract Text
See more of: Particle Removal
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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