2105
Numerical Study of Single Bubble Dynamics in Megasonic Field for New Physical Cleaning Method

Monday, October 28, 2013: 15:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Naoya Ochiai, Ph.D , Institute of Fluid Science, Tohoku University, Sendai, Japan
Jun Ishimoto , Institute of Fluid Science, Tohoku University

Abstract:

  • E8-2105 (342.7KB) - Abstract Text
See more of: Wet Etching and Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
<< Previous Abstract | Next Abstract >>