2106
Challenges and Solutions for 450mm FEOL Wet Clean Tool

Monday, October 28, 2013: 16:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Bill Yu, Ph.D , G450C, Albany, NY
Felix Ku , G450C
Charles Taft , G450C
Anne-Sophie Larrea , G450C
John Lin, Ph.D , G450C
Toyohide Hayashi , Dainippon Screen
Akira Morita , Dainippon Screen
Kenichiro Arai , Dainippon Screen
Hideji Naohara , Dainippon Screen

Abstract:

See more of: Wet Etching and Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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