2130
Wet-Chemical Etching of InGaAs for Advanced CMOS Processing

Wednesday, October 30, 2013: 09:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Dennis H. van Dorp , imec, Heverlee, Belgium
S. Arnauts , Imec
Daniel Cuypers , KULeuven, Leuven, Belgium
Jens Rip , imec
Frank Holsteyns , imec
Stefan De Gendt , imec

Abstract:

  • E8-2130 (190.3KB) - Abstract Text
See more of: Non-silicon Material Cleaning and Conditioning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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